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Advanced Customized Semiconductor Wafer Carrier Alumina Disk Suppliers,Manufacturers
Alumina Wafer Carriers are precision-engineered components made from high-purity alumina (Al₂O₃) ceramic, designed for holding and transporting wafers. They are widely used in semiconductor wafer processes such as sintering, diffusion, annealing, CVD/ALD coating, laser dicing, and wafer-level packaging. Thanks to their excellent high-temperature resistance, high chemical stability, and superior flatness, these carriers have become indispensable consumables in wafer manufacturing.
Advanced Customized Semiconductor Wafer Carrier Alumina Disk Suppliers,Manufacturers
Product Description
Our high-purity Ceramic(Al₂O₃ ≥99.5%) Wafer Carriers undergo dense sintering and precision grinding. They feature flatness controlled within 0.02–0.05 mm and a mirror-like surface finish, ensuring uniform wafer contact, stable vacuum or electrostatic clamping, and consistent thin-film thickness across the entire wafer. Capable of withstanding temperatures exceeding 1600°C, these carriers offer excellent chemical and plasma resistance and generate minimal particulates; they resist warping and contamination even after repeated thermal cycling in etching, deposition, diffusion, and cleaning chambers. The product range covers all standard wafer sizes from 2 to 12 inches, with customizable features—such as vacuum hole arrays, alignment pins, and stepped profiles—available according to specific design drawings.
Product Features
1. High-Purity Material
Utilizes 99.5%–99.8% high-purity alumina ceramic, effectively preventing wafer contamination from metal ion leaching and meeting the cleanliness standards of semiconductor processes.
2. Exceptional High-Temperature Performance
Suitable for long-term use at temperatures exceeding 1600°C; features a low thermal expansion coefficient and excellent thermal shock resistance, ensuring no cracking or deformation during repeated thermal cycling.
3. Ultra-High Machining Precision
Achieves micron-level (μm) flatness and parallelism, ensuring uniform heating and precise positioning of the wafer on the carrier, thereby enhancing process consistency.
4. Excellent Chemical Stability
Resistant to acid and alkali corrosion and oxidation; inert to most process gases and metal coatings, ensuring a long service life.
5. Superior Insulation and Wear Resistance
Offers high insulation resistance and dielectric strength, combined with high hardness, wear resistance, and mechanical strength, making it highly durable and resistant to breakage.
6. Excellent Surface Quality
Precision-ground and polished to achieve low surface roughness (Ra < 0.2μm); free of particulate shedding and porosity, preventing wafer scratches.
Key Technical Parameters
| Item | Typical Indicators |
| Material | high-purity alumina ceramics (Al₂O₃ ≥ 99.5%) |
| Density | ≥ 3.9 g/cm³ |
| Flexural Strength | ≥ 380 MPa |
| Vickers Hardness | ≥ 1800 HV |
| Maximum Operating Temperature | 1600°C (1550°C for long-term use) |
| Coefficient of Thermal Expansion (20–1000°C) | 7–8 × 10⁻⁶ /K |
| Surface Roughness | Ra 0.1–0.8 μm (customizable upon request) |
| Flatness | ≤ 5 μm (depending on specifications) |
| Dimensional Accuracy | ±0.02mm |
| Dielectric Strength | ≥ 15 kV/mm |
Specifications and Model
Typical Application Scenarios
1.Semiconductor Manufacturing: wafer handling and transport within diffusion, oxidation, and annealing furnaces;
2.Thin-Film Deposition: wafer carriers for CVD, PECVD, ALD, and PVD processes;
3.LED / Compound Semiconductors: high-temperature process carriers for sapphire substrates, SiC, and GaN epitaxial wafers;
4.MEMS and Sensors: Wafer-level packaging, bonding, and sintering processes;
5.Photovoltaics and Electronic Ceramics: Sintering of solar cells and electronic components.
Summary of Product Advantages
| Comparison Dimensions | Advantages of Alumina Carrier Trays |
| Compared to quartz susceptors | higher mechanical strength and wear resistance; longer service life; resistant to deformation. |
| Compared to silicon carbide susceptors | lower cost, good processing performance, and flexible dimensions and specifications. |
| Compared to metal carrier trays | free from metal contamination, high-temperature resistant, electrically insulating, and chemically resistant. |
Customization and Service System
RFQ
1.What is the purity of the alumina? Is it 99.5% or 99.8%? Can you provide a material test report?
Our picture product purity is 99.5%.We could provide material test report,if you like it,pls contact cindy@w7ceramicspartsltd.com.
2.What levels of flatness and parallelism can be achieved? Will this affect the uniformity of wafer heating?
We can cheive high-precision grade,flatness≤2–3μm,parallelism≤2μm.
3.What is the dimensional tolerance?
It is ±0.02mm.
4.What is the normal service life?
Our product service life is 1–3 years
5.How stable is the supply?
Our monthly production capacity is 1000pcs.
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